Ergebnisse für: reactive sputtering

Hier findest Du Bücher, die sich mit reactive sputtering beschäftigen.

Buch Cover Control-oriented modeling and feedback control of reactive sputtering
This thesis investigates the nonlinear reactive sputter process in a novel way: both from the control-theoretical side and from the plasma-physical side. The plasma behavior is explicitly considered for the process modeling and for the design of the control system to establish steady-state plasma c...
Buch Cover Multivariable dynamic modeling and plasma-oriented advanced process control of nonlinear reactive sputtering
Christian Wölfel
BoD – Books on Demand
150 € · Paperback
PhD Thesis
This thesis investigates the nonlinear reactive sputter process in a novel way: both from the control-theoretical side and from the plasma-physical side. The plasma behavior is explicitly considered for the process modeling and for the design of the control system to establish steady-state plasma c...
Buch Cover Discovery and Optimization of Multi-Cation Nitride Semiconductors via Reactive Sputtering for Photoelectrochemical Water Splitting
Laura Idoya Wagn
Verein zur Förderung des Walter Schottky Instituts der Technischen Universität München
18 € · Paperback
semiconductor reactive sputtering nitrides
This thesis focuses on the development and application of novel semiconducting transition metal nitride materials for photoelectrochemical (PEC) water splitting and renewable hydrogen production. PEC water splitting is a promising approach to generating green hydrogen, which is considered a sustaina...
Buch Cover Reactive Sputter Deposition
The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin ?lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called phy...
Buch Cover Transparent Conductive ZnO:Al Thin Films Prepared by In-line Reactive Mid-frequency Magnetron Sputtering.
Dotierte Zinkoxidschichten (ZnO) haben sich, aufgrund ihrer guten elektrischen Leitfähigkeit bei gleichzeitig hoher Transparenz und deutlich geringeren Kosten, im Vergleich zu zinndotierten Indiumoxidschichten (ITO), zu einem Schwerpunktthema innerhalb der Forschung transparenter leitfähiger Oxide...
Buch Cover Reactive Sputter Deposition
The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin ?lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called phy...
Buch Cover Reactive Sputter Deposition
The most straightforwardmethod to change the surface properties of a ma- rial is to deposit a thin ?lm or coating on it. Hence, it is not surprising that an overwhelming amount of scienti?c and technical papers is published each year on this topic. Sputter deposition is one of the many so-called phy...
Buch Cover Investigation of industrially-suited processes for deposition of oxide thin films by high power impulse magnetron sputtering.
The scope of this work is to investigate and to develop advanced HIPIMS processes for deposition of oxides, utilizing industrial-scale equipment and technology. Two classes of oxide materials were studied: insulating (aluminum oxide) and conducting oxides (indium-tin oxide and aluminum-doped zinc ox...
Buch Cover Tribology and Surface Engineering
The book covers very important issues, not only scientific in nature but, ultimately, for industry and the economy. Wear and deterioration of surface properties during operation is a natural and unavoidable phenomenon. However, minimizing the degree of wear is of great importance for the entire econ...
Buch Cover Trends and New Applications of Thin Films
Volume is indexed by Thomson Reuters CPCI-S (WoS).The proceedings of this Symposium cover a broad range of areas concerned with thin film research and applications. Particular emphasis is placed on the properties of thin films and their final application in modern technology....
Buch Cover Application of Photoactive Nanomaterials in Degradation of Pollutants
Photoactive nanomaterials have been receiving increasing attention due to their potential application in the light-driven degradation of water and gas-phase pollutants. However, to exploit the great potential of photoactive materials and access their properties requires fine-tuning of their size/sha...

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