Ergebnisse für: Reactive sputter process

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Control-oriented modeling and feedback control of reactive sputtering

Christian Wölfel
BoD – Books on Demand
59.95 € · Hardcover

Reactive sputter process Feedback control systems Multipole Resonance Probe (MRP) Plasma-based control Thin film deposition

This thesis investigates the nonlinear reactive sputter process in a novel way: both from the control-theoretical side and from the plasma-physical side. The plasma behavior is explicitly considered for the process modeling and for the design of the control system to establish steady-state plasma c...

Array
(
    [endpoint] => /products?search=Reactive+sputter+process&page=0&size=20
    [httpCode] => 200
    [curlError] => 
    [os_errno] => 0
    [primary_ip] => 144.208.215.243
    [local_ip] => 192.168.53.111
    [namelookup_time] => 0.003001
    [connect_time] => 0.521606
    [responseLength] => 2788
)