Ergebnisse für: floating slug

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MDPI
€ · Paperback

thermoelectric power sensor wideband GaAs MMIC MEMS floating slug back cavity microwave measurement MEMS high temperature pressure sensors AlGaN/GaN circular HFETs GaN diaphragm adaptive control backstepping approach tracking performance microgyroscope

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...

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