Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications
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Beschreibung
This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.
This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.
Details simple methodology for the realization of the practical micro devices employed in general applications Brings practical concept along with process details associated with device realization Provides basic overview and discusses practical aspects with characterization data
Autor*in
Kamaljeet Singh
Themen in »Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications«
MEMS Thin film stress Microsensor Microheater Acoustic sensor Contamination