Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems
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Beschreibung
This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.
This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.
Discusses knowledge points in order of concept, principle, microdevice manufacturing, and application Includes a lot of detailed cases to help readers with a profound understanding of micro-nano process Combines process principles and application examples with rigorous logic
Autor*in
Jingmin Li
Themen in »Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems«
Micro-nano Manufacturing Micro-Electro-Mechanical Systems (MEMS) Silicon Microprocessing Technology LIGA/quasi-LIGA Technology Micro-nano Device