Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
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Beschreibung
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.
It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.
It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Records the dual-mass linear vibration silicon-based MEMS gyroscope in detail Identifies "Post-Demographic Golden Age" Gives detailed descriptions of each research technology and optimization method
Autor*in
Huiliang Cao
Themen in »Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope«
Dual-mass Quadrature correction Noise analysis Measurement and control circuit Temperature compensation technology Frequency tuning