Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
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Beschreibung
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies Broad coverage from technology fundamentals all the way to device applications Includes supplementary material: sn.pub/extras
Autor*in
Evgeni Gusev
Themen in »Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators«
CMOS integrated circuit metal microelectromechanical system (MEMS) semiconductor sensor static-induction transistor