Mechanical properties of thin films studied by bulge testing
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Beschreibung
The bulge test is a method of choice for investigating the mechanical behavior of freestanding films as thin as a few hundreds of nanometers. The work presented in this book extends the scope of this technique to the study of the fracture, time-dependent and fatigue properties of different kinds of membranes, with applications to gold and silicon nitride samples. These results were achieved during a PhD thesis performed at the Institute for General Materials Properties of the Materials Science Department at the Friedrich-Alexander-University Erlangen-Nürnberg.
The bulge test is a method of choice for investigating the mechanical behavior of freestanding films as thin as a few hundreds of nanometers. The work presented in this book extends the scope of this technique to the study of the fracture, time-dependent and fatigue properties of different kinds of membranes, with applications to gold and silicon nitride samples. These results were achieved during a PhD thesis performed at the Institute for General Materials Properties of the Materials Science Department at the Friedrich-Alexander-University Erlangen-Nürnberg.
Autor*in
Benoit Merle
Themen in »Mechanical properties of thin films studied by bulge testing«
Bulge Test Dünne Schicht Mechanische Eigenschaft