Design, Fabrication and Characterization of a MEMS-Based Counter-Current Flame Ionization Detector

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This work describes the development of a MEMS-based counter-current flame ionization detector (cc-µFID). FEM simulations are used for design optimization, fabrication relies on standard silicon-glass micro-technology, and FID performance is characterized as a function of micro-burner geometry, gas flow, sample concentration, and mode of sample supply.
This work describes the development of a MEMS-based counter-current flame ionization detector (cc-µFID). FEM simulations are used for design optimization, fabrication relies on standard silicon-glass micro-technology, and FID performance is characterized as a function of micro-burner geometry, gas flow, sample concentration, and mode of sample supply.

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Winfred J. Kuipers

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