Topic of the presented thesis is the development of a Deep Level Transient Spectroscopy (DLTS) simulator combining the convenient state-of-the-art computation of electrostatics in devices with the flexibility of a completely independent C++ - code, to validate and test the implications of different models for the capture and emission of electrans and holes to a defect state. Conclusions about the electrical nature of defects obtained fram the comparison of DLTS simulations and measurements can subsequently be used to refine the simulation of leakage currents.
Artur Scheinemann
DLTS, Leakage Currents Deep Level Transient Spectroscopy Extra-Functionality Devices