Vertical comb-drive actuators for millimeter waveguide applications. Scientific Reports on Micro and Nanosystems Vol. 21
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Yunjia Li
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Comb-drive Electrostatic actuator MEMS actuator Millimeter wave SU-8 Waveguide
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Details
ISBN: 9783862474530
Verlag: Der Andere Verlag
Erscheinung: 30.12.2014