Combination of ion plating and metal ion implantation for low-temperature coating on different materials
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Beschreibung
The transition metal nitrides TiN and CrN are well known compounds displaying a rather high hardness, resistance against wear and corrosion, thus enabling their use as wear resistant hard coatings. On the basis of the elements titanium, chromium and nitrogen test series were produced using a combination of ion plating and metal plasma ion implantation. Hybrid ionplating techniques by applying an electromagnetic enhanced arc source and a d.c. magnetron sputtering source were used for the deposition of the coatings. The applied metal vapor vacuum arc (MEVVA) ion source was equipped with either a Cr or a Ti-cathode, a low-frequency ignition system and high voltage supplies for the ion acceleration and plasma shielding.
A low-temperature PVD technique was developed by combining the deposition process with a metal plasma ion implantation (MPII). The substrate temperature was kept below 50°C for polymers and 150°C for metal parts by applying pulsed bias voltage during the surface refinement of the thermal sensible rapid-prototyping (RP) materials. Polished cemented carbide inserts with simple geometry were used as samples for the physical characterization of the coatings. Electron microscopy techniques (SEM, EDX) and nanoindentation methods were performed for the characterization of the micro-structural and physical properties (hardness, elastic modulus, adhesion) of the surface refined RP parts respectively. It will be shown that the physical properties of the coatings were clearly influenced by the special parameters of the combined low-temperature PVD process. Especially, the effect of the metal ion implantation into the surface region of the RP materials before and during the deposition will be discussed.
Autor*in
Pawan K Singh
Themen in »Combination of ion plating and metal ion implantation for low-temperature coating on different materials«
Chromnitrid Ionenimplantation Ionenplattieren Schutzschicht Titannitrid Vakuumbeschichten