Productronica 97 - Proceedings HLF.
Semiconductor Equipment and Materials Contamination Control and Defect Reduction.
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Beschreibung
The subject of the Productronica Workshop 'Semiconductor Equipment and Materials®' in Munich 1997 was contamination control and defect reduction. They are one of the key issues of semiconductor manufacturing with larger wafer diameter and smaller structures. The contribution of the speakers dealed with cleaning, particle detection, contamination, defects, yield, measuring systems and materials like wafer and chemicals etc.
Autor*in
Heiner Ryssel
Themen in »Productronica 97 - Proceedings HLF.«
Fraunhofer IIS-B contamination control contamination control defect reduction defect reduction semiconductor equipment semiconductor equipment semiconductor manufacturing semiconductor manufacturing semiconductor material semiconductor materials yield yield