18th European Mask Conferences on Mask Technology for Integrated Circuits and Micro-Components, Lectures held at the GMM-Conference January 15-16, 2002 in Munich, Germany
EUR 58,80
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Beschreibung
In diesem Tagungsband werden u.a. folgende Themen behandelt: Integrated Circuits, Micro-Components, Feinwerktechnik, Next Generation Mask, NGM, Mask Application, MAP, Pattern Generation, PGP, Bacus, BAC, Motrology, Inspection, Repair.