Microsphere-assisted high-resolution interference microscopy
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Beschreibung
Miniaturization in industry and research increases the demand for surface metrology capable of resolving sub-micrometer structures. Optical metrology is fast and non-contact, but its lateral resolution is fundamentally limited by the microscope optics and the wavelength of light. To overcome this limit, recent research has explored approaches such as additional optical elements, advanced signal processing, and modified illumination.
This dissertation investigates microsphere-assisted interference microscopy, in which microspheres are placed in the near field of an object to enhance the lateral resolution of coherence scanning interferometry. Experimental results demonstrate reconstructed surface topographies beyond the conventional resolution limit. The work also examines the physical mechanisms responsible for this improvement through rigorous near-field simulations and experimental studies. Objects above and below the resolution limit are analyzed, compared with simulated interferometric data, and evaluated in the 3D spatial frequency domain. The results show that microspheres significantly influence image formation by modifying transfer behavior and diffraction orders, thereby improving the transmission of object information into the far field.
Autor*in
Lucie Hüser
Themen in »Microsphere-assisted high-resolution interference microscopy«
Interferometry Resolution Optical metrology Super-resolution microsphere