Retroreflex Ellipsometry for Nonplanar Surfaces
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Beschreibung
Retroreflex ellipsometry addresses the geometric restrictions of conventional ellipsometry by using a retroreflective sheet, which returns the light beam from the sample on the same beam path. Simulation and experiments of retroreflex ellipsometry in two- and three-phase systems have been demonstrated based on the proposed concepts, which have shown the capabilities of ellipsometric measurements on nonplanar surfaces.
Autor*in
Chia-Wei Chen
Themen in »Retroreflex Ellipsometry for Nonplanar Surfaces«
Retroreflex-Ellipsometrie Müller-Matrix Ellipsometrie gekrümmte Oberflächen Dünnschicht- Messtechnik Retroreflex ellipsometry Mueller matrix Ellipsometry Curved surfaces Thin-film metrology