Diffractive lens arrays are proposed in this work for application in reflected-light confocal microscopes. They have overcome the limitations between fields of view and resolution of traditional objectives. Experiments of multi-spot confocal imaging in surface metrology and fluorescence microscopy have been demonstrated based on the proposed concepts, which have shown capabilities of high-resolution measurement over a large area.
Zheng Li
diffraktives optisches Element Konfokalmikroskopie Fluoreszenzmikroskopie Metrologie 3D Messtechnik diffractive optical element confocal microscopy fluorescence microscopy metrology 3D measurement technology