Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
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Beschreibung
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
Nominated as an Excellent Doctoral Dissertation by Peking University Presents a mass-production technology to realize micro/nano hierarchical structures on various substrates Broadens readers' understanding on the new micro/nano integrated fabrication technology by experimental tests and theoretical simulations Introduces the technology in microenergy field and realizes several novel high-performance nanogenerators Includes supplementary material: sn.pub/extras
Autor*in
Xiao-Sheng Zhang
Themen in »Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting«
Flexible Material Improved DRIE Process Micro/Nano Hierarchical Structures Micro/Nano Integrated Fabrication Microenergy Source Nanogenerator Silicon Soft Lithography