Micro and Nano Fabrication
Tools and Processes
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Beschreibung
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Describes the tools required for fabricating MNEMS systems Gives insight into the process technologies Fits for practitioners and students of MNEMS Includes supplementary material: sn.pub/extras
Autor*in
Hans H. Gatzen
Themen in »Micro and Nano Fabrication«
MEMS MNEMS Micro Electro-mechanical Systems NEMS Nano Electro-mechanical Systems Thin-film fabrication fabrication processes fabrication tools
Stimmen zu »Micro and Nano Fabrication«
“The book is clearly written and easy to read. The various topics are balanced and well organized. … The numerous figures and schematics are the most useful tools of the book. … It is useful to students and newcomers, but also experts may find it a good reference because there are some useful aspects not easily found in other books … . the book offers a good opportunity to go through the basic semiconductor fabrication technologies.” (Rosaria A. Puglisi, MRS Bulletin, Vol. 40, October, 2015)
“Provide an excellent summary and explanation for nearly every micro and nano fabrication subject that readers could possibly be interested in learning about. … this work is useful as an instructional aid with comprehension questions at the end of each chapter, as well as a chapter that contains a start-to-finish example of device fabrication. … Summing Up: Recommended. Lower- and upper-division undergraduates, graduate students, and two-year technical program students.” (N. M. Fahrenkopf,Choice, Vol. 52 (12), August, 2015)
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