Sputtering by Particle Bombardment III
Characteristics of Sputtered Particles, Technical Applications
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Beschreibung
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.
Autor*in
Rainer Behrisch
Themen in »Sputtering by Particle Bombardment III«
Sputtering Teilchenphysik surface analysis plasma technology thin-film deposition spectrometry energy material materials science physics production research science spectrometry surface surface analysis surface science