In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.
Radiation defects in semiconductors have become an important factor as semiconductor device technologies include implantation. The knowledge presented here is also important for space applications. The book will appeal to researchers, engineers and advanced students.
This book summarizes the current knowledge of radiation defects in semiconductors It will be a useful reference work for scientists involved in semiconductor processing.- This book is important for space applications of semiconductors and solar cells.- It provides information on the application of sensors in nuclear power plants.
C. Claeys
Microelectronics Radiation damage Semiconductor Semiconductor devices and circuits Space and nuclear electronics ULSI Technology environment modeling