Laser-Assisted Microtechnology
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Beschreibung
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
The book summarizes the significant results and outlines the impressive perspectives of laser technology in microelectronic fabrication. In the exposition of a large body of heterogenous material on laser machining of thin films, laser application in assembly and mounting operation and on laser assisted modification and synthesis of materials,the physico-chemical basis of the relevant process is presented, thogether with the technical and technological pecularities of its application in microelectronic technology. This approach should be interesting for a varied circle of readers.
Autor*in
Simeon M. Metev
Themen in »Laser-Assisted Microtechnology«
Laser Microtechnology Microprocessing Microtechnology ablation analog circuit design electromagnetic wave energy integrated circuit model phase polymer semiconductor thin films