Rare Earth Oxide Thin Films
Growth, Characterization, and Applications
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Beschreibung
Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.
Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.
State-of-the-art contributions of experts in the field of emerging materials (rare earth oxides) for microelectronics, nanoscience, spintronics, optoelectronics, and related technologies Includes supplementary material: sn.pub/extras
Autor*in
Marco Fanciulli
Themen in »Rare Earth Oxide Thin Films«
Deposition methods EELS Experiment High-k dielectrics Microelectronics PED REM Rare earth oxides microscopy semiconductor spectroscopy spintronics thin film thin films transmission electron microscopy