Thin Films Material Technology
Sputtering of Compound Materials
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Beschreibung
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts.
Key topics: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses; Covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.
Reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering
Autor*in
Kiyotaka Wasa
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Sputtering Systems Structural Control Thin Films
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From the reviews:
"The book starts by defining thin film materials and describing the basics of their nucleation and growth. … I found the book useful and would not hesitate to recommend it as essential reading to anyone who is entering the field of sputter deposition, particularly the deposition of compound materials." (Dr. Charles A. Bishop, Materials World, Vol. 14 (10), 2006)
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