High-Resolution X-Ray Scattering from Thin Films and Multilayers

Beschreibung

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.
This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.
- First monograph on thin-layer and multilayer x-ray analysis
- Up-to-date review
- Critical overview of the literature

Autor*in

Vaclav Holy

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