Sputtering by Particle Bombardment
Experiments and Computer Calculations from Threshold to MeV Energies
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Beschreibung
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.
Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results to provide a state-of-the-art report covering theoretical as well as experimental aspects of sputtering. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems.
State-of-the-art report covering theoretical as well as experimental aspects of sputtering Written by leading experts Includes supplementary material: sn.pub/extras
Autor*in
Rainer Behrisch
Themen in »Sputtering by Particle Bombardment«
Energie Helium-Atom-Streuung distribution dynamics ion sputtering particle bombardment plasma physics sputtering