Fast Simulation of Electro-Thermal MEMS
Efficient Dynamic Compact Models
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Beschreibung
Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.
Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.
Provides the knowledge required to design electro-thermal MEMS on a simulation basis Includes supplementary material: sn.pub/extras
Autor*in
Tamara Bechtold
Themen in »Fast Simulation of Electro-Thermal MEMS«
Arnoldi algorithm Electro-thermal simulation MEMS Model order reduction Software development environment microelectromechanical system (MEMS) microsystems model simulation