Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
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Beschreibung
With contributions by numerous experts
With contributions by numerous experts
Autor*in
R. Behrisch
Themen in »Sputtering by Particle Bombardment II«
Elektronenstrahlung Festkörper Ionenbeschuss Neutronenstrahlung Oberfläche Plantation compound development electron electrons heavy ion ion neutron photon
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Details
ISBN: 9783540125938
Verlag: Springer Berlin
Erscheinung: 01.10.1983