Ion Implantation Techniques
Lectures given at the Ion Implantation School in Connection with Fourth International Conference on Ion Implantation: Equipment and Techniques Berchtesgaden, Fed. Rep. of Germany, September 13–15, 1982
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Beschreibung
Autor*in
H. Ryssel
Themen in »Ion Implantation Techniques«
Absorption Apertur Plasmat computer design development machine material mechanisms model production scattering semiconductor spectroscopy units
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Details
ISBN: 9783540118787
Verlag: Springer Berlin
Erscheinung: 01.09.1982