Atomic Layer Processing
Semiconductor Dry Etching Technology
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Beschreibung
This practical guide, written by an author actively involved in corporate R&D, provides in-depth information on etching technologies that are used in the semiconductor industry, helping engineers to select the right technologies for their task and to design etching processes.
Autor*in
Thorsten Lill
Themen in »Atomic Layer Processing«
Chemie Chemistry Dünne Schichten, Oberflächen u. Grenzflächen Electrical & Electronics Engineering Elektrotechnik u. Elektronik Halbleiter Materials Science Materialwissenschaften Oberflächen- u. Kolloidchemie Semiconductors Surface & Colloid Chemistry Thin Films, Surfaces & Interfaces