Resonant MEMS
Fundamentals, Implementation, and Application
Buch in deiner Nähe kaufen
Beschreibung
A must-have for any MEMS R&D group: for the first time fundamental and hard-to-come-by knowledge is combined in one ready reference.
The book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then goes on to provide a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the latest applications of resonant MEMS, such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Autor*in
Oliver Brand
Themen in »Resonant MEMS«
Electrical & Electronics Engineering Elektrotechnik u. Elektronik Materials Science Materialwissenschaften MEMS Nanotechnologie Nanotechnology Sensor Sensor Materials Sensoren Synthese u. Produktion von Nanosystemen Synthesis/Production of Nanosystems