High-k Gate Dielectrics for CMOS Technology
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Beschreibung
A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological
viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these
materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies.
Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections
with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.
Autor*in
Gang He
Themen in »High-k Gate Dielectrics for CMOS Technology«
CMOS Components & Devices Dielektrikum Electrical & Electronics Engineering Elektrotechnik u. Elektronik Halbleiterphysik Komponenten u. Bauelemente MEMS Nanomaterial Nanomaterialien Nanomaterials Nanostrukturiertes Material Nanotechnologie Nanotechnology Physics