Plasma-Aided Nanofabrication
From Plasma Sources to Nanoassembly
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Beschreibung
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
Autor*in
Ken Ostrikov
Themen in »Plasma-Aided Nanofabrication«
Electrical & Electronics Engineering Elektrotechnik u. Elektronik Materials Science Materials Science Special Topics Materialwissenschaften MEMS Nanomaterialien Nanomaterials Nanotechnologie Nanotechnology Physics Physik Spezialthemen Materialwissenschaften Thermal Physics & Statistical Mechanics Wärmelehre u. Statistische Mechanik