Etching in Microsystem Technology

Beschreibung

Explaining the scientific fundamentals of etching processes which occupy a key position in microfabrication this work is a practical guide for etching processes. The practical section is set out like a cookery book: it gives recipes for many etching processes and helps to produce perfect microstructures.

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Michael Köhler

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Chemische Technik Mikrosystemtechnik Technik Ätzen

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