Metrology and Physical Mechanisms in New Generation Ionic Devices
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Beschreibung
The thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed.
This thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed.
Nominated as an outstanding PhD thesis by the KU Leuven and Imec, Belgium Presents a valuable new Scanning Probe Microscopy concept Represents an important step forward in 3D metrology Author awarded the Roger A. Haken Best Paper Award at the International Electron Devices Meeting (IEDM) 2013 Includes supplementary material: sn.pub/extras
Autor*in
Umberto Celano
Themen in »Metrology and Physical Mechanisms in New Generation Ionic Devices«
Resistive Switching Conductive Filaments Scalpel SPM Ionic Devices Conductive Bridging Memory CBRAM RRAM C-AFM AFM Tomography 3D Metrology