Piezoelectric MEMS Resonators
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Beschreibung
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:
- Widely-used piezoelectric materials, as well as materials in which there is emerging interest
- Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
- Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
- Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
- ...and more!
The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:
- Widely-used piezoelectric materials, as well as materials in which there is emerging interest
- Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
- Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
- Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
- ...and more!
Reviews exhaustively the key recent developments in piezoelectric MEMS resonator design and optimization, manufacturing and reliability, and materials for piezoelectric resonators Provides many examples of real world implementations of piezo-MEMS resonators, including an overview of existing commercial opportunities for piezoelectric MEMS resonators Maximizes reader insights into the advantages of MEMS technologies and challenges that have to be overcome in order to meet market needs Broadens readers’ understanding of piezoelectric MEMS resonator design, with a focus on specific parameter optimization such as Q, electromechanical coupling, and temperature compensation Includes supplementary material: sn.pub/extras
Autor*in
Harmeet Bhugra
Themen in »Piezoelectric MEMS Resonators«
AlN MEMS BAW piezoelectric resonators GaAs for MEMS GaN NEMS GaN Resonator MEMS Resonators PZT MEMS PiezoMEMS Resonators Piezoelectric MEMS pMEMS