Nanopositioning Technologies
Fundamentals and Applications
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Beschreibung
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Enriches understanding of the latest fundamentals and applications of nanopositioning technologies Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation under scanning electron microscopes and nanopositioning for semiconductor inspection Reviews comprehensively key recent research into nanopositioner design, sensors, actuators, controls and emerging applications
Autor*in
Changhai Ru
Themen in »Nanopositioning Technologies«
Flexure-Guided Nanopositioning MEMS Nanopositioning Nanomanipulation Nanopositioning Applications Nanopositoning Technologies Nanopostioning Piezoelectric Actuation Piezoelectric Nanopositioning Tracking Control for Nanopositioning