Subsecond Annealing of Advanced Materials
Annealing by Lasers, Flash Lamps and Swift Heavy Ions
Buch in deiner Nähe kaufen
Beschreibung
The thermal processing of materials ranges from few femtoseconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.
The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.
Written by leading researchers in the field Describes annealing-related processes in semiconductor technology Includes a broad range of examples Includes supplementary material: sn.pub/extras
Autor*in
Wolfgang Skorupa
Themen in »Subsecond Annealing of Advanced Materials«
Activation of Dopants Annealing by Swift Heavy Ions Epitaxial Growth of Silicon Explosive Crystallisation Flash Lamp Annealing Pulsed Laser Annealing Radiation Thermometry Sub-second Annealing Thermal Processing of Materials Thermal Spike-induced Nanostructuring