Beam Injection Assessment of Microstructures in Semiconductors
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Beschreibung
BIAMS 2000
The characterisation of semiconductors is of key importance in preparing and applying semiconductors in industry.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The present work deals with theoretical and experimental topics which are related to the assessment of microstructures in semiconductors by means of beam injection and related methods.
Autor*in
Trans Tech Publications Ltd
Themen in »Beam Injection Assessment of Microstructures in Semiconductors«
Annealing Cathodoluminescence Defect Diffusion Length Dislocation EBIC Electron Beam Induced Current (EBIC) Scanning Electron Microscope (SEM) Semiconductor Silicon