Ultra Clean Processing of Silicon Surfaces V
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Beschreibung
UCPSS 2000
Volume is indexed by Thomson Reuters CPCI-S (WoS).
The proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).
Autor*in
Trans Tech Publications Ltd
Themen in »Ultra Clean Processing of Silicon Surfaces V«
Cleaning Contamination Copper (Cu) DRAMs Megasonics Metal Contamination Organic Ozone Particle Removal Semiconductor Cleaning