Hydrogen in Compound Semiconductors
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Beschreibung
State-of-the-art reviews on all the major areas of interest are brought together in this book, namely the role of hydrogen during epitaxial growth, its entry into the material during processing, its subsequent diffusivity and bonding with dopants, other impurities or defects, its effect on device performance and reliability and positive uses for hydrogen in passivating surfaces.
Autor*in
Trans Tech Publications Ltd
Themen in »Hydrogen in Compound Semiconductors«
Annealing AsH3 Cleaning Deposition Dopant Passivation Dopant-Hydrogen Complexes Dry Etching ECR GaAs Growth Herojunction Bipolar Transistor (HBT) Hydrogen Hydrogen Passivation Implantation InGaAs