DIY MEMS
Fabricating Microelectromechanical Systems in Open Use Labs
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Beschreibung
This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.
- Introduces the MEMS fabrication processes and equipment
- Explains how totake the first steps - where to start and get initial advice and further assistance
- Includes a global list of MEMS facilities and resources with contact information
This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.
Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information
Autor*in
Deborah Munro
Themen in »DIY MEMS«
Actuators Cleanrooms DIY Fabrication Lithography MEMS MEMS Packaging Microelectromechanical systems Microfabrication Nanotechnology National Nanotechnology Infrastructure Network NNCI Open use labs Soft materials Biomedical Engineering