Mechanical Properties of Silicon Based Compounds: Silicides
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Beschreibung
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
Focus on the mechanical properties of silicides Presents the fabrication process for bulk silicides and thin films Special chapter on deformation in nano silicides
Autor*in
Joshua Pelleg
Themen in »Mechanical Properties of Silicon Based Compounds: Silicides«
very large scale integration thermoelectric technology transition metal silicides Seebeck coefficient silicon based integrated circuits