Lithography
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Beschreibung
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Autor*in
Stefan Landis
Themen in »Lithography«
Chemical Engineering Chemische Verfahrenstechnik Electrical & Electronics Engineering Electronic Materials Elektronische Materialien Elektrotechnik u. Elektronik Lithographie Process Development Verfahrensentwicklung Verfahrenstechnik