Diffractive Optics and Optical Microsystems

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Autor*in

S. Martellucci

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LIGA Sensor electromagnetic wave microelectromechanical system (MEMS) micromechanics microsystems optics

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`The book is an excellent resource for physicists and engineers in the field. It contains many ideas and practical details for the design and construction of microoptical devices.'
Optik, 110:6 (1999)

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