Fundamental Principles of Optical Lithography
The Science of Microfabrication
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Beschreibung
The fabrication of an integrated circuit requires a variety ofphysical and chemical processes to be performed on a semiconductorsubstrate. In general, these processes fall into three categories:film deposition, patterning, and semiconductor doping. Films ofboth conductors and insulators are used to connect and isolatetransistors and their components.
By creating structures of these various components millions oftransistors can be built and wired together to form the complexcircuitry of modern microelectronic devices. Fundamental to all ofthese processes is lithography, ie, the formation ofthree-dimensional relief images on the substrate for subsequenttransfer of the pattern to the substrate.
This book presents a complete theoretical and practicaltreatment of the topic of lithography for both students andresearchers. It comprises ten detailed chapters plus threeappendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhancesthe reader's understanding as the website supplies information onhow you can download a free laboratory manual, Optical LithographyModelling with MATLAB®, to accompany the textbook. You canalso contact the author and find help for instructors.
Autor*in
Chris Mack
Themen in »Fundamental Principles of Optical Lithography«
Electrical & Electronics Engineering Elektrotechnik u. Elektronik Halbleiter Halbleiterphysik Lithographie Physics Physik Semiconductor Physics Semiconductors