Silicon Technologies

Beschreibung

The main purpose of this book is to remind new engineers in siliconfoundry, the fundamental physical and chemical rules in major Frontend treatments: oxidation, epitaxy, ion implantation and impuritiesdiffusion.

Autor*in

Annie Baudrant

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Electrical & Electronics Engineering Electronic Materials Elektronische Materialien Elektrotechnik u. Elektronik Materials Science Materialwissenschaften MEMS

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