Berg Sensor Technology in the Netherlands: State of the Art

Sensor Technology in the Netherlands: State of the Art

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Proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2–3 March 1998

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Beschreibung

In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical structures for sensing or actuation. Such micromechanical structures are particularly well-suited to realize complex microsystems that improve the performance of individual sensors. Currently, a variety of sensor areas ranging from optical to magnetic and from micromechanical to (bio)chemical sensors has reached a high level of sophistication.
In this MESA Monograph the proceedings of the Dutch Sensor Conference, an initiative of the Technology Foundation (STW), held at the University of Twente on March 2-3, 1998, are compiled. It comprises all the oral and poster contributions of the conference, and gives an excellent overview of the state of the art of Dutch sensor research and development. Apart from Dutch work, the contributions of two external invited experts from Switzerland are included.

Autor*in

Albert van den Berg

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CMOS Multiplexer SQUID Sensor Standard Transistor electronics field-effect transistor integrated circuit ion-sensitive field effect transistor single-electron transistor static-induction transistor thin film

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Details

ISBN: 9780792350101
Verlag: Springer Netherland
Erscheinung: 28.02.1998

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