Ion Implantation Technology 2010
18th International Conference on Ion Implantation Technology IIT 2010
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Beschreibung
The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.
Autor*in
Jiro Matsuo
Themen in »Ion Implantation Technology 2010«
LSI fabrication ion implantation ion-solid interactions nanomanufacturing solid state physics
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Details
ISBN: 9780735408760
Verlag: AIP Press
Erscheinung: 25.01.2011