Semiconductor Sensors
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Beschreibung
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
Autor*in
Simon M. Sze
Themen in »Semiconductor Sensors«
Electrical & Electronics Engineering Elektrotechnik u. Elektronik Halbleiter Sensor Sensoren, Instrumente u. Messung Sensors, Instrumentation & Measurement